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Technology"}},{"authorName":{"typeName":"authorName","multiple":false,"typeClass":"primitive","value":"Björling, Alexander"},"authorAffiliation":{"typeName":"authorAffiliation","multiple":false,"typeClass":"primitive","value":"Lund University"},"authorIdentifierScheme":{"typeName":"authorIdentifierScheme","multiple":false,"typeClass":"controlledVocabulary","value":"ORCID"},"authorIdentifier":{"typeName":"authorIdentifier","multiple":false,"typeClass":"primitive","value":"0000-0001-5681-2292"}},{"authorName":{"typeName":"authorName","multiple":false,"typeClass":"primitive","value":"Mannix, Dan"},"authorAffiliation":{"typeName":"authorAffiliation","multiple":false,"typeClass":"primitive","value":"University Grenoble Alpes, European Spallation Source, Aarhus 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Groningen"}},{"authorName":{"typeName":"authorName","multiple":false,"typeClass":"primitive","value":"Noheda, Beatriz"},"authorAffiliation":{"typeName":"authorAffiliation","multiple":false,"typeClass":"primitive","value":"University of Groningen"},"authorIdentifierScheme":{"typeName":"authorIdentifierScheme","multiple":false,"typeClass":"controlledVocabulary","value":"ORCID"},"authorIdentifier":{"typeName":"authorIdentifier","multiple":false,"typeClass":"primitive","value":"0000-0001-8456-2286"}}]},{"typeName":"datasetContact","multiple":true,"typeClass":"compound","value":[{"datasetContactName":{"typeName":"datasetContactName","multiple":false,"typeClass":"primitive","value":"Research Data Office"},"datasetContactAffiliation":{"typeName":"datasetContactAffiliation","multiple":false,"typeClass":"primitive","value":"University of Groningen"}}]},{"typeName":"dsDescription","multiple":true,"typeClass":"compound","value":[{"dsDescriptionValue":{"typeName":"dsDescriptionValue","multiple":false,"typeClass":"primitive","value":"Unconventional ferroelectricity, robust at reduced nanoscale sizes, exhibited by hafnia-based thin-films  presents  tremendous  opportunities  in  nanoelectronics.  However,  the  exact  nature  of polarization  switching  remains  controversial.  Here,  we  investigate  epitaxial  Hf0.5Zr0.5O2(HZO) capacitors,  interfaced  with  oxygen  conducting  metals  (La0.67Sr0.33MnO3,  LSMO)  as  electrodes, using  atomic  resolution  electron  microscopy  while in  situelectrical  biasing.  By  direct  oxygen imaging, we observe  reversible oxygen vacancy  migration from the bottom to the top electrode through HZO and reveal associated reversible structural phase transitions in the epitaxial LSMO and  HZO  layers.  We  follow  the  phase  transition  pathways  at  the  atomic  scale  and  identify  that these mechanisms are at play both in tunnel junctions and ferroelectric capacitors switched with sub-millisecond  pulses. Our  results  unmistakably  demonstrate  that  oxygen  voltammetry  and polarization switching are intertwined in these materials."},"dsDescriptionDate":{"typeName":"dsDescriptionDate","multiple":false,"typeClass":"primitive","value":"2021"}}]},{"typeName":"subject","multiple":true,"typeClass":"controlledVocabulary","value":["Chemistry","Physics"]},{"typeName":"keyword","multiple":true,"typeClass":"compound","value":[{"keywordValue":{"typeName":"keywordValue","multiple":false,"typeClass":"primitive","value":"Nanoelectronics"}},{"keywordValue":{"typeName":"keywordValue","multiple":false,"typeClass":"primitive","value":"Ferroelectricity"}},{"keywordValue":{"typeName":"keywordValue","multiple":false,"typeClass":"primitive","value":"Oxygen imaging"}}]},{"typeName":"publication","multiple":true,"typeClass":"compound","value":[{"publicationRelationType":{"typeName":"publicationRelationType","multiple":false,"typeClass":"controlledVocabulary","value":"IsSupplementTo"},"publicationCitation":{"typeName":"publicationCitation","multiple":false,"typeClass":"primitive","value":"Pavan Nukala et al. ,Reversible oxygen migration and phase transitions in hafnia-based ferroelectric devices.Science372,630-635(2021)."},"publicationIDType":{"typeName":"publicationIDType","multiple":false,"typeClass":"controlledVocabulary","value":"doi"},"publicationIDNumber":{"typeName":"publicationIDNumber","multiple":false,"typeClass":"primitive","value":"10.1126/science.abf3789"},"publicationURL":{"typeName":"publicationURL","multiple":false,"typeClass":"primitive","value":"https://doi.org/10.1126/science.abf3789"}}]},{"typeName":"language","multiple":true,"typeClass":"controlledVocabulary","value":["English"]},{"typeName":"grantNumber","multiple":true,"typeClass":"compound","value":[{"grantNumberAgency":{"typeName":"grantNumberAgency","multiple":false,"typeClass":"primitive","value":"Horizon 2020, EU"},"grantNumberValue":{"typeName":"grantNumberValue","multiple":false,"typeClass":"primitive","value":"794954"}}]},{"typeName":"depositor","multiple":false,"typeClass":"primitive","value":"Elsenga, Christina"},{"typeName":"dateOfDeposit","multiple":false,"typeClass":"primitive","value":"2021-04-08"},{"typeName":"accessToSources","multiple":false,"typeClass":"primitive","value":"Metadata:\nFile types:\n1. .emd for electron microscopy data\n2. .h5 for synchrotron data\n3. .opg for analysis of electrical data, and plots from quantitative electron microscopy and X-ray diffraction\n\n.emd files: Nomenclature\nFig #- type of images-magnification.emd\nAbbrevations (general)\nSTEM: Scanning Transmission Electron Microscope\nAbbrevations (Image types)\nDPC: Differential Phase Contrast\nHAADF: High angle annular dark field\nDF4: 4’ Dark field detector image (roughly corresponds to annular bright field)\nSI: Spectrum Image\nEDS: Energy Dispersive Spectrum\nExample:\nFig 1b DPC HAADF DF4 4.9 Mx.emd means this is Fig 1B presented in the paper, and the file contains DPC (Differential phase contrast), HAADF (High angle annular dark field) and DF4 (Annular Bright field) images each obtained at 4.9 Mx magnification.\n\nMultiple datasets from the same figure # appear in a folder named with the Figure #. Location of the dataset used in the figure is represented as right/left.\n\n.h5 files Nomenclature:\nBy themselves #.hdf5 files are metadata files containing information about the intensities on the 2D merlin detector at various 2-theta (angle between x-ray source and detector). # represents the experiment number in the Max-IV beam line. All the synchrotron data used in this work and corresponding python codes for analysis are stored in separate folders, each folder named as the figure in which this data is used. For example, folder named Fig S10a consists of .h5 data file, .h5 mask file, and the python code used to analyse this data to generate what was presented in Fig S10a\n\n.opj files: Nomenclature\nFigure # - data explanation.opj\nExample : Fig 4c -collated P-E-T data.opj means Figure #4c as presented in the paper, and the origin file consists of Polarization-Electric field-temperature data and its analysis used to generate Fig 4c.\n\nCodes for Microscopy data:\nPython and Matlab codes used for analysis of microscopy data are in the folder: “Codes for TEM”\nFiles are named as: Fig numbers- explanation of the code .m/txt. \nExample Fig 3b-S6a and b python code for oxygen displacement.txt means this code was used to analyze data in Figs 3b, S6a and S6b published in the paper. 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